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Micromachines as Tools for Nanotechnology

This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating nano-objects. The book covers state-of-the-art MEMS and NEMS devices for DNA molecular handling and analysis, cell handling and culture on a chip, chemical lab-on-a-chip, multi-probes for vacuum tunneling microscopy and AFM, and characterization of quantum semiconductor structures. Readers will gain deep insight into such developments and students will learn about the emerging field of MEMS and nanotechnology.
EAN: 9783540008569
Sprache: Englisch
Seitenzahl: 211
Produktart: Gebunden
Herausgeber: Fujita, Hiroyuki
Verlag: Springer Springer, Berlin Springer Berlin Heidelberg
Schlagworte: Mikrotechnik Nanotechnologie
Größe: 19 × 158 × 243
Gewicht: 454 g